TIME-RESOLVED REFLECTIVITY MEASUREMENTS ON SILICON AND GERMANIUM USING A PULSED EXCIMER KRF LASER-HEATING BEAM

被引:148
作者
JELLISON, GE
LOWNDES, DH
MASHBURN, DN
WOOD, RF
机构
来源
PHYSICAL REVIEW B | 1986年 / 34卷 / 04期
关键词
D O I
10.1103/PhysRevB.34.2407
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:2407 / 2415
页数:9
相关论文
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