SATURATION OF OPTICAL DEGRADATION IN A-SI-H FILMS WITH DIFFERENT MORPHOLOGIES

被引:14
作者
OHAGI, H [1 ]
NAKATA, JI [1 ]
MIYANISHI, A [1 ]
IMAO, S [1 ]
JEONG, M [1 ]
SHIRAFUJI, J [1 ]
FUJIBAYASHI, K [1 ]
INUISHI, Y [1 ]
机构
[1] OSAKA UNIV, FAC ENGN, DEPT ELECT ENGN, SUITA, OSAKA 565, JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1988年 / 27卷 / 12期
关键词
D O I
10.1143/JJAP.27.L2245
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:L2245 / L2247
页数:3
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