EFFECT OF SUBSTRATE-TEMPERATURE ON PROPERTIES OF GLOW-DISCHARGED HYDROGENATED AMORPHOUS-SILICON

被引：35

作者：

SHIRAFUJI, J

KUWAGAKI, M

SATO, T

INUISHI, Y

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1984年 / 23卷 / 10期

关键词：

D O I：

10.1143/JJAP.23.1278

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1278 / 1286

页数：9

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