APPLICATION OF AUGER-ELECTRON DEPTH PROFILE ANALYSIS TO THIN-FILM INTERDIFFUSION STUDIES

被引：23

作者：

PAMLER, W

机构：

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1987年 / 42卷 / 03期

关键词：

D O I：

10.1007/BF00620604

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：219 / 226

页数：8

共 53 条

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