MOIRE DISPLACEMENT MEASUREMENT TECHNIQUE FOR A LINEAR ENCODER

被引：12

作者：

HANE, K

UCHIDA, Y

HATTORI, S

机构：

[1] Nagoya Univ, Dep of, Electronic-Mechanical Engineering,, Nagoya, Jpn, Nagoya Univ, Dep of Electronic-Mechanical Engineering, Nagoya, Jpn

来源：

OPTICS AND LASER TECHNOLOGY | 1985年 / 17卷 / 02期

关键词：

MECHANICAL VARIABLES MEASUREMENT - Position - OPTICAL INSTRUMENTS - Gratings;

D O I：

10.1016/0030-3992(85)90007-6

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The light intensity diffracted from superimposed dual transmission gratings is sensitive to their relative lateral displacement but is also affected by changes in the air gap between them. Averaging the diffracted light intensities obtained in the gap range of a Fourier image distance, the resultant intensity was almost independent of the gap between the two gratings and had a period of half the pitch of the grating for the lateral displacement. This method can be used for a linear encoder in precision machining.

引用

页码：89 / 95

页数：7

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