CHEMICAL PROFILING AND STRUCTURAL STUDIES OF ION BEAM-MIXED ALUMINUM ON SILICON

被引：3

作者：

NAMAVAR, F ^{[1
]}

BUDNICK, JI ^{[1
]}

OTTER, FA ^{[1
]}

机构：

[1] UNITED TECHNOL RES CTR,E HARTFORD,CT 06108

来源：

THIN SOLID FILMS | 1983年 / 104卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(83)90546-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：31 / 41

页数：11

共 21 条

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