MICROPLASMA INTERACTION IN SILICON P-N JUNCTIONS

被引:11
作者
HAITZ, RH
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D O I
10.1016/0038-1101(64)90041-3
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:439 / &
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