DAMAGE PROFILES IN MGO SINGLE-CRYSTALS AFTER KRYPTON IMPLANTATION

被引：6

作者：

FRIEDLAND, E

机构：

[1] Department of Physics, University of Pretoria, Pretoria

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1993年 / 80-1卷

关键词：

D O I：

10.1016/0168-583X(93)96091-P

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Single crystals of magnesium oxide were implanted with 150 keV krypton ions at room temperature. Fluences ranged from 5 x 10(14) to 5 x 10(15) at. cm-2 with dose rates well below 10(13) at. cm-2 s-1 to prevent target heating. Defect profiles were obtained by fitting aligned alpha-particle backscattering spectra to a dechanneling rate equation. For the lowest fluence the depth profile of the damaged region agrees reasonably with theoretical estimates, whilst at higher fluences a significantly increased depth of the damaged region is found. The energy dependence of dechanneling as well as the general shape of the aligned backscattering spectra indicate a defect structure consisting of a combination of dislocation loops and severely disordered regions.

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页码：128 / 131

页数：4

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