DIAGNOSTICS AND MODELING OF PLASMA PROCESSES IN ION SOURCES

被引:23
作者
VERTES, A
GIJBELS, R
ADAMS, F
机构
[1] Department of Chemistry, University of Antwerp (U.I.A.), Wilrijk, B-2610
关键词
D O I
10.1002/mas.1280090104
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
[No abstract available]
引用
收藏
页码:71 / 113
页数:43
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