THE INTERPRETATION OF ELLIPSOMETRIC MEASUREMENTS OF ION-BOMBARDMENT OF NOBLE-GASES ON SEMICONDUCTOR SURFACES

被引：13

作者：

HOLTSLAG, AHM

SLAGER, UC

VANSILFHOUT, A

机构：

来源：

SURFACE SCIENCE | 1985年 / 152卷 / APR期

关键词：

D O I：

10.1016/0039-6028(85)90523-0

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：1079 / 1085

页数：7

共 12 条

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