VACUUM STABILITY OF EPITAXIAL NIGA AND NI2GA3 LAYERS MBE GROWN ONTO A GAAS SUBSTRATE

被引:11
作者
GUENAIS, B
POUDOULEC, A
CAULET, J
GUIVARCH, A
机构
[1] Centre National d'Etudes des Télécommunications, F-22301 Lannion Cedex, Route de Trégastel
关键词
D O I
10.1016/0022-0248(90)90862-F
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Metallic epilayers of NiGa (cubic) and Ni2Ga3 (hexagonal pseudo-cubic) were grown onto a GaAs substrate in a molecular beam epitaxy system. With the intent to grow a semiconductor/metal/semiconductor structure, the stability of the NiGa/GaAs and Ni2Ga3/GaAs systems, at 500°C in ultra-high vacuum, under an As4 flux, was studied by transmission electron microscopy. The behaviour of the two compounds appears to be different: NiGa interacts with GaAs, and due to As sublimation, this interaction leads to Ni2Ga3; on the other hand, Ni2Ga3 is thermodynamically stable in contact with GaAs. However, the Ni2Ga3 epilayer tends to agglomerate, onto a (001) GaAs substrate as well as a (111) one, and the stability of the film is not preserved at 500°C. Moreover, onto a (001) substrate, the Ni2Ga3 layer is observed to be composed of twinned domains, because of the symmetry difference between the two phases in the interface plane. Anyway it is concluded that the growth of a GaAs overlayer onto NiGa and Ni2Ga3 films will have to be performed at low temperature. © 1990.
引用
收藏
页码:925 / 932
页数:8
相关论文
共 23 条
[1]  
Bradley AJ, 1937, PHILOS MAG, V23, P1049
[2]   MOLECULAR-BEAM EPITAXIAL-GROWTH OF LATTICE MATCHED GAAS/ERP0.6AS0.4/(001) AND (111) GAAS HETEROSTRUCTURES [J].
CAULET, J ;
LECORRE, A ;
GUENAIS, B ;
ROPARS, G ;
GUIVARCH, A .
JOURNAL OF CRYSTAL GROWTH, 1990, 102 (1-2) :309-313
[3]  
GUENAIS B, 1989, I PHYS C SER, V100
[4]   METALLURGICAL STUDY OF NI/GAAS CONTACTS .1. EXPERIMENTAL-DETERMINATION OF THE SOLID PORTION OF THE NI-GA-AS TERNARY-PHASE DIAGRAM [J].
GUERIN, R ;
GUIVARCH, A .
JOURNAL OF APPLIED PHYSICS, 1989, 66 (05) :2122-2128
[5]   GROWTH OF ALPHA-RH2AS ON GAAS(001) IN A MOLECULAR-BEAM EPITAXY SYSTEM [J].
GUIVARCH, A ;
SECOUE, M ;
GUENAIS, B ;
BALLINI, Y ;
BADOZ, PA ;
ROSENCHER, E .
JOURNAL OF APPLIED PHYSICS, 1988, 64 (02) :683-687
[6]   GROWTH OF RHGA ON GAAS (001) IN A MOLECULAR-BEAM EPITAXY SYSTEM [J].
GUIVARCH, A ;
SECOUE, M ;
GUENAIS, B .
APPLIED PHYSICS LETTERS, 1988, 52 (12) :948-950
[7]   EPITAXIAL, THERMODYNAMICALLY STABILIZED METAL III-V COMPOUND SEMICONDUCTOR INTERFACE - NIGA ON GAAS (001) [J].
GUIVARCH, A ;
GUERIN, R ;
SECOUE, M .
ELECTRONICS LETTERS, 1987, 23 (19) :1004-1005
[8]   GROWTH OF NI3GA2, NIGA AND NI2GA3 ON GAAS (001) AND (111) IN A MOLECULAR-BEAM EPITAXY SYSTEM [J].
GUIVARCH, A ;
CAULET, J ;
GUENAIS, B ;
BALLINI, Y ;
GUERIN, R ;
POUDOULEC, A ;
REGRENY, A .
JOURNAL OF CRYSTAL GROWTH, 1989, 95 (1-4) :427-430
[9]   METALLURGICAL STUDY OF NI/GAAS CONTACTS .2. INTERFACIAL REACTIONS OF NI THIN-FILMS ON (111) AND (001) GAAS [J].
GUIVARCH, A ;
GUERIN, R ;
CAULET, J ;
POUDOULEC, A ;
FONTENILLE, J .
JOURNAL OF APPLIED PHYSICS, 1989, 66 (05) :2129-2136
[10]   EPITAXIAL-GROWTH OF METALLIC ERP, ERSB AND LATTICE-MATCHED ERPXSB(1-X) LAYERS ON (001)INP AND (001)GAAS [J].
GUIVARCH, A ;
CAULET, J ;
LECORRE, A .
ELECTRONICS LETTERS, 1989, 25 (16) :1050-1052