2-DIMENSIONAL MICROSCOPIC UNIFORMITY OF RESISTIVITY IN SEMI-INSULATING GAAS

被引:27
作者
MATSUMURA, T [1 ]
OBOKATA, T [1 ]
FUKUDA, T [1 ]
机构
[1] OPTOELECTR JOINT RES LAB,NAKAHARA KU,KAWASAKI 211,JAPAN
关键词
D O I
10.1063/1.334513
中图分类号
O59 [应用物理学];
学科分类号
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页码:1182 / 1185
页数:4
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