INITIAL-STAGES OF IRIDIUM-SEMICONDUCTOR COMPOUND FORMATION - A FIELD-ION-MICROSCOPE STUDY OF INTERFACE ATOMIC STRUCTURES

被引:12
作者
LIU, HF
LIU, HM
TSONG, TT
机构
关键词
D O I
10.1103/PhysRevLett.56.65
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页码:65 / 68
页数:4
相关论文
共 9 条
[1]  
HO PS, 1982, THIN FILMS INTERFACE
[2]   GROWTH OF THIN SINGLE-CRYSTAL NISI2 FILMS ON SI SURFACES, A FIELD-ION MICROSCOPE STUDY [J].
LIU, HF ;
LIU, HM ;
TSONG, TT .
APPLIED PHYSICS LETTERS, 1985, 47 (05) :524-526
[3]   REVIEW OF BINARY ALLOY FORMATION BY THIN-FILM INTERACTIONS [J].
OTTAVIANI, G .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (05) :1112-1119
[4]   FORMATION OF IRIDIUM SILICIDES FROM IR THIN-FILMS ON SI SUBSTRATES [J].
PETERSSON, S ;
BAGLIN, J ;
HAMMER, W ;
DHEURLE, F ;
KUAN, TS ;
OHDOMARI, I ;
SOUSAPIRES, JD ;
TOVE, P .
JOURNAL OF APPLIED PHYSICS, 1979, 50 (05) :3357-3365
[5]  
Poate J M, 1978, THIN FILMS INTERDIFF
[6]  
SHUNK FA, 1969, CONSTITUTION BINA S2
[7]  
TSONG TT, 1983, J VACUUM SCI TECHN B, V1, P917
[8]   FORMATION OF ULTRATHIN SINGLE-CRYSTAL SILICIDE FILMS ON SI - SURFACE AND INTERFACIAL STABILIZATION OF SI-NISI2 EPITAXIAL STRUCTURES [J].
TUNG, RT ;
GIBSON, JM ;
POATE, JM .
PHYSICAL REVIEW LETTERS, 1983, 50 (06) :429-432