THE EFFECT OF OXYGEN ON DIAMOND SYNTHESIS IN A MICROWAVE PLASMA-JET

被引:24
作者
TAKEUCHI, K
YOSHIDA, T
机构
[1] Department of Metallurgy and Materials Science, Faculty of Engineering, University of Tokyo, Bunkyo-ku, Tokyo 113
关键词
D O I
10.1063/1.351059
中图分类号
O59 [应用物理学];
学科分类号
摘要
Although the effect of oxygen on diamond synthesis has been reported in many papers, the exact role of oxygen has not been clarified yet. The effect of oxygen on diamond synthesis in a microwave plasma jet is investigated and an attempt is made to find out the exact role of oxygen by using optical emission spectroscopy and quadrupole mass spectroscopy. The results reveal that oxygen removes C2H2 selectively in a boundary layer by producing CO, and clarify the importance of the CH(x) to C2H2 ratio at the place. Therefore, oxygen seems to form an advantageous environment for diamond synthesis rather than accelerate the removal of nondiamond carbons.
引用
收藏
页码:2636 / 2639
页数:4
相关论文
共 12 条
[1]   EFFECTS OF OXYGEN ON DIAMOND GROWTH [J].
HARRIS, SJ ;
WEINER, AM .
APPLIED PHYSICS LETTERS, 1989, 55 (21) :2179-2181
[2]   SYNTHESIS OF DIAMOND THIN-FILMS BY THERMAL CVD USING ORGANIC-COMPOUNDS [J].
HIROSE, Y ;
TERASAWA, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (06) :L519-L521
[3]   DIAMOND SYNTHESIS FROM GAS-PHASE IN MICROWAVE PLASMA [J].
KAMO, M ;
SATO, Y ;
MATSUMOTO, S ;
SETAKA, N .
JOURNAL OF CRYSTAL GROWTH, 1983, 62 (03) :642-644
[4]   EFFECTS OF OXYGEN ON CVD DIAMOND SYNTHESIS [J].
KAWATO, T ;
KONDO, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 (09) :1429-1432
[5]   THE EFFECT OF OXYGEN IN DIAMOND DEPOSITION BY MICROWAVE PLASMA ENHANCED CHEMICAL VAPOR-DEPOSITION [J].
LIOU, Y ;
INSPEKTOR, A ;
WEIMER, R ;
KNIGHT, D ;
MESSIER, R .
JOURNAL OF MATERIALS RESEARCH, 1990, 5 (11) :2305-2312
[6]   GROWTH OF DIAMOND PARTICLES FROM METHANE-HYDROGEN GAS [J].
MATSUMOTO, S ;
SATO, Y ;
TSUTSUMI, M ;
SETAKA, N .
JOURNAL OF MATERIALS SCIENCE, 1982, 17 (11) :3106-3112
[7]   DEVELOPMENT OF A NEW MICROWAVE PLASMA TORCH AND ITS APPLICATION TO DIAMOND SYNTHESIS [J].
MITSUDA, Y ;
YOSHIDA, T ;
AKASHI, K .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1989, 60 (02) :249-252
[8]   THE GROWTH OF DIAMOND IN MICROWAVE PLASMA UNDER LOW-PRESSURE [J].
MITSUDA, Y ;
KOJIMA, Y ;
YOSHIDA, T ;
AKASHI, K .
JOURNAL OF MATERIALS SCIENCE, 1987, 22 (05) :1557-1562
[9]   INSITU EMISSION AND MASS SPECTROSCOPIC MEASUREMENT OF CHEMICAL-SPECIES RESPONSIBLE FOR DIAMOND GROWTH IN A MICROWAVE PLASMA-JET [J].
MITSUDA, Y ;
TANAKA, KI ;
YOSHIDA, T .
JOURNAL OF APPLIED PHYSICS, 1990, 67 (08) :3604-3608
[10]   ON THE ROLE OF OXYGEN AND HYDROGEN IN DIAMOND-FORMING DISCHARGES [J].
MUCHA, JA ;
FLAMM, DL ;
IBBOTSON, DE .
JOURNAL OF APPLIED PHYSICS, 1989, 65 (09) :3448-3452