共 26 条
- [1] ALBIN DS, 1987, SPRAY PYROLYSIS OPTO, V2, P243
- [2] BLANDENET G, 1981, THIN SOLID FILMS, V77, P695
- [3] FUNDAMENTALS OF CHEMICAL VAPOR-DEPOSITION [J]. JOURNAL OF MATERIALS SCIENCE, 1977, 12 (07) : 1285 - 1306
- [5] CHARLOT G, 1983, CHEM REACTIONS AQUEO, P242
- [6] CHOPRA KL, 1969, THIN FILM PHENOMENA, P83
- [9] INTERRELATIONSHIPS BETWEEN PROCESS PARAMETERS, STRUCTURE, AND PROPERTIES OF CVD TUNGSTEN AND TUNGSTEN-RHENIUM ALLOYS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (04): : 701 - 708