SELF-CONSISTENT MODELING OF LOW-PRESSURE RF DISCHARGES IN OXYGEN PLASMA

被引：26

作者：

FEOKTISTOV, VA

MUKHOVATOVA, AV

POPOV, AM

RAKHIMOVA, TV

机构：

[1] Microelectronics Group, Institute of Nuclear Physics, Moscow State University, Moscow

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1995年 / 28卷 / 07期

关键词：

D O I：

10.1088/0022-3727/28/7/011

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A self-consistent numerical model has been developed for an RF plasma discharge in oxygen. The model contains about 100 ion-molecular reactions with 13 neutral and charged species of the AF plasma. The energy distributions of both charged and neutral plasma components with respect to the electrodes have been calculated using a Monte Carte method. The angular distributions of fast neutral species have also been calculated.

引用

页码：1346 / 1353

页数：8

共 33 条

[11] Measurements of electron energy distribution in low-pressure RF discharges [J].