TUNGSTEN ETCHING IN CF4 AND SF6 DISCHARGES

被引：94

作者：

TANG, CC

HESS, DW

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1984年 / 131卷 / 01期

关键词：

D O I：

10.1149/1.2115489

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：115 / 120

页数：6

共 14 条

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