BUILDUP AND ANNEALING OF DAMAGE INDUCED BY ION AND ELECTRON-BEAMS AT SIO2 SURFACES - AN AES STUDY

被引：30

作者：

LANG, B

机构：

来源：

APPLIED SURFACE SCIENCE | 1989年 / 37卷 / 01期

关键词：

D O I：

10.1016/0169-4332(89)90974-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：63 / 77

页数：15

共 37 条

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