MATERIAL PROCESSING WITH BROAD-BEAM ION SOURCES

被引:43
作者
HARPER, JME [1 ]
CUOMO, JJ [1 ]
KAUFMAN, HR [1 ]
机构
[1] COLORADO STATE UNIV, DEPT PHYS, FT COLLINS, CO 80523 USA
来源
ANNUAL REVIEW OF MATERIALS SCIENCE | 1983年 / 13卷
关键词
D O I
10.1146/annurev.ms.13.080183.002213
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:413 / 439
页数:27
相关论文
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