OPTICAL AND ELECTRONIC-PROPERTIES OF THE ELECTRON-BEAM RESIST POLY(BUTENE-1-SULFONE)

被引：11

作者：

WILLIAMS, MW

YOUNG, DW

ASHLEY, JC

ARAKAWA, ET

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 58卷 / 11期

关键词：

D O I：

10.1063/1.335525

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4360 / 4364

页数：5

共 16 条

[1] THE OPTICAL-PROPERTIES OF KAPTON - MEASUREMENT AND APPLICATIONS [J].

ARAKAWA, ET ;

WILLIAMS, MW ;

ASHLEY, JC ;

PAINTER, LR .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (05) :3579-3582

[2] ARC-EVAPORATED CARBON-FILMS - OPTICAL-PROPERTIES AND ELECTRON MEAN FREE PATHS [J].

ARAKAWA, ET ;

DOLFINI, SM ;

ASHLEY, JC ;

WILLIAMS, MW .

PHYSICAL REVIEW B, 1985, 31 (12) :8097-8101

[3] SIMPLE-MODEL FOR ELECTRON INELASTIC MEAN FREE PATHS - APPLICATION TO CONDENSED ORGANIC MATERIALS [J].

ASHLEY, JC .

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1982, 28 (03) :177-194

[4] ELECTRON MEAN FREE PATHS IN SOLID ORGANIC INSULATORS [J].

ASHLEY, JC ;

WILLIAMS, MW .

RADIATION RESEARCH, 1980, 81 (03) :364-373

[5] REEVALUATION OF X-RAY ATOMIC ENERGY LEVELS [J].

BEARDEN, JA ;

BURR, AF .

REVIEWS OF MODERN PHYSICS, 1967, 39 (01) :125-&

[6] ELECTRON-IRRADIATION OF POLY(OLEFIN SULFONES) - APPLICATION TO ELECTRON-BEAM RESISTS [J].

BOWDEN, MJ ;

THOMPSON, LF .

JOURNAL OF APPLIED POLYMER SCIENCE, 1973, 17 (10) :3211-3221

[7] SYSTEMATICS OF MOMENTS OF DIPOLE OSCILLATOR-STRENGTH DISTRIBUTIONS FOR ATOMS OF 1ST AND 2ND ROW [J].

DEHMER, JL ;

INOKUTI, M ;

SAXON, RP .

PHYSICAL REVIEW A, 1975, 12 (01) :102-121

[8] ION-BEAM EXPOSURE CHARACTERISTICS OF RESISTS - EXPERIMENTAL RESULTS [J].

HALL, TM ;

WAGNER, A ;

THOMPSON, LF .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (06) :3997-4010

[9] ERRORS IN USING REFLECTANCE VS ANGLE OF INCIDENCE METHOD FOR MEASURING OPTICAL CONSTANTS [J].

HUNTER, WR .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1965, 55 (10P1) :1197-&

[10] OPTICAL-PROPERTIES OF POLYSTYRENE FROM NEAR-INFRARED TO X-RAY REGION AND CONVERGENCE OF OPTICAL SUM-RULES [J].

INAGAKI, T ;

ARAKAWA, ET ;

HAMM, RN ;

WILLIAMS, MW .

PHYSICAL REVIEW B, 1977, 15 (06) :3243-3253

← 1 2 →