PHOTOREFLECTANCE OF ALXGA1-XAS AND ALXGA1-XAS/GAAS INTERFACES AND HIGH-ELECTRON-MOBILITY TRANSISTORS

被引:63
作者
SYDOR, M
JAHREN, N
MITCHEL, WC
LAMPERT, WV
HAAS, TW
YEN, MY
MUDARE, SM
TOMICH, DH
机构
[1] WRIGHT RES & DEV CTR,MAT LAB,WRIGHT PATTERSON AFB,OH 45433
[2] SYSTRAN CORP,DAYTON,OH 45432
[3] UNIV DAYTON,RES INST,DAYTON,OH 45469
关键词
D O I
10.1063/1.344532
中图分类号
O59 [应用物理学];
学科分类号
摘要
Photoreflectance is used to measure AlxGa1-xAs composition, and to determine carrier concentrations in Si-doped AlGaAs epilayers capped with GaAs. Undoped caps are generally depleted, and do not show a usual GaAs photoreflectance. However, photoreflectance from the cap/(doped AlGaAs) interface produces a broad signal which distorts the entire spectrum, making it hard to locate the GaAs and AlGaAs band edges precisely. A similar broad signal from modulation-doped heterostructures is apparently associated with samples that show the presence of two-dimensional electron gas.
引用
收藏
页码:7423 / 7429
页数:7
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