BIAXIAL MODULUS MEASUREMENT OF CHEMICAL VAPOR-DEPOSITED POLYCRYSTALLINE DIAMOND FILMS

被引:15
作者
CARDINALE, GF
TUSTISON, RW
机构
[1] Raytheon Company, Lexington, Massachusetts
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1991年 / 9卷 / 04期
关键词
MECHANICAL-PROPERTIES; THIN-FILMS; STRESS; COATINGS;
D O I
10.1116/1.577251
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The biaxial modulus of polycrystalline diamond (PCD) films deposited by microwave plasma assisted chemical vapor deposition on silicon substrates has been investigated. The amount of hydrogen incorporated in the PCD films is determined using Fourier transform infrared spectroscopy. Additional characterization of the PCD films is performed using x-ray diffraction, Raman spectroscopy, and scanning electron microscope analysis. Biaxial moduli of PCD films containing 0.9% and 0.3% hydrogen have been found to be 960 and 1177 GPa, respectively. Comparison with the biaxial modulus of 1228 GPa for a randomly oriented aggregate of bulk diamond is discussed.
引用
收藏
页码:2204 / 2209
页数:6
相关论文
共 24 条
[1]  
Beams J.W., 1959, STRUCTURE PROPERTIES, P183
[2]  
BEETZ CP, 1989, 19TH BIENN C CARB PE, P436
[3]   INTERNAL-STRESS AND ELASTICITY OF SYNTHETIC DIAMOND FILMS [J].
BERRY, BS ;
PRITCHET, WC ;
CUOMO, JJ ;
GUARNIERI, CR ;
WHITEHAIR, SJ .
APPLIED PHYSICS LETTERS, 1990, 57 (03) :302-303
[4]   A TECHNIQUE FOR THE DETERMINATION OF STRESS IN THIN-FILMS [J].
BROMLEY, EI ;
RANDALL, JN ;
FLANDERS, DC ;
MOUNTAIN, RW .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04) :1364-1366
[5]  
CARDINALE GF, 1990, SPIE P, V1325
[6]   DETERMINATION OF THE ELASTIC-MODULUS AND RESIDUAL-STRESSES IN CERAMIC COATINGS USING A STRAIN-GAUGE [J].
CHIU, CC .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1990, 73 (07) :1999-2005
[7]   STRESS-STRAIN CURVES FOR CEMENTED TUNGSTEN CARBIDE AND SINTERED DIAMOND COMPACT [J].
DUNN, KJ ;
BUNDY, FP .
JOURNAL OF APPLIED PHYSICS, 1978, 49 (12) :5865-5870
[8]  
EDWARDS DF, 1985, HDB OPTICAL CONSTANT, P673
[9]   IMPACT DAMAGE THRESHOLDS IN BRITTLE MATERIALS IMPACTED BY WATER DROPS [J].
EVANS, AG ;
ITO, YM ;
ROSENBLATT, M .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (05) :2473-2482
[10]   BRILLOUIN-SCATTERING IN DIAMOND [J].
GRIMSDITCH, MH ;
RAMDAS, AK .
PHYSICAL REVIEW B, 1975, 11 (08) :3139-3148