THE EFFECT OF AN AXIAL MAGNETIC-FIELD ON PERIODIC GROWTH-RATE FLUCTUATIONS IN CZOCHRALSKI CRYSTAL-GROWTH

被引:3
作者
CARTWRIGHT, RA
WHEELER, AA
机构
[1] Univ of Bristol, Bristol, Engl, Univ of Bristol, Bristol, Engl
关键词
CRYSTALS - Growing - MATHEMATICAL MODELS;
D O I
10.1016/0022-0248(88)90095-4
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
In this paper we develop a mathematical model to investigate the effect of growth rate fluctuations in magnetic Czochralski crystal growth. The pull rate is assumed constant and the growth rate fluctuates with frequency omega rad/s, the crystal rotation rate. We explore the effect of the magnetic field and the crucible rotation on fluid flow and mass transfer in the vicinity of the crystal/melt interface. Numerical results are obtained for 0 less than equivalent to N less than equivalent to 32 and minus 0. 1 less than equivalent to s less than equivalent to 1. 0, where N is the magnetic interaction parameter and s is the ratio of crucible to crystal rotation. Asymptotic results are obtained for the velocity field for large N and agreement is good for N greater than 4. The analysis is extended to the concentrtion field to give asymptotic results for N yields infinity , Sc yields infinity , N/Sc**2 yields infinity where Sc is the Schmidt number. Again the asymptotic results agree well with the numerical solutions. We conclude that the phase of the resulting concentration fluctuations appears to be independent of N and s.
引用
收藏
页码:466 / 480
页数:15
相关论文
共 14 条
[1]   ON ROTATING-DISK FLOW [J].
BRADY, JF ;
DURLOFSKY, L .
JOURNAL OF FLUID MECHANICS, 1987, 175 :363-394
[2]   THE EFFECT OF AN AXIAL MAGNETIC-FIELD AT THE INTERFACE OF A CRYSTAL GROWN BY THE CZOCHRALSKI METHOD [J].
CARTWRIGHT, RA ;
ELKADDAH, N ;
SZEKELY, J .
IMA JOURNAL OF APPLIED MATHEMATICS, 1985, 35 (02) :175-194
[3]   THE INFLUENCE OF CRUCIBLE ROTATION ON THE EFFECTIVE DISTRIBUTION COEFFICIENT IN CZOCHRALSKI AND MAGNETIC CZOCHRALSKI GROWTH [J].
CARTWRIGHT, RA ;
HURLE, DTJ ;
SERIES, RW ;
SZEKELY, J .
JOURNAL OF CRYSTAL GROWTH, 1987, 82 (03) :327-334
[4]   AVOIDANCE OF GROWTH-STRIAE IN SEMICONDUCTOR AND METAL CRYSTALS GROWN BY ZONE-MELTING TECHNIQUES [J].
CHEDZEY, HA ;
HURLE, DTJ .
NATURE, 1966, 210 (5039) :933-&
[5]   EFFECTS OF ADC INDUCED PULL RATE FLUCTUATIONS ON DOPANT SEGREGATION IN CZOCHRALSKI SI CRYSTALS [J].
CHOE, KS ;
STRUDWICK, TH .
JOURNAL OF CRYSTAL GROWTH, 1986, 74 (02) :338-344
[6]  
HJELLMING L, 1987, J CRYST GROWTH, V83, P51
[7]   MELT MOTION IN A CZOCHRALSKI CRYSTAL PULLER WITH AN AXIAL MAGNETIC-FIELD - ISOTHERMAL MOTION [J].
HJELLMING, LN ;
WALKER, JS .
JOURNAL OF FLUID MECHANICS, 1986, 164 :237-273
[8]   MELT MOTION IN A CZOCHRALSKI CRYSTAL PULLER WITH AN AXIAL MAGNETIC-FIELD - MOTION DUE TO BUOYANCY AND THERMOCAPILLARITY [J].
HJELLMING, LN ;
WALKER, JS .
JOURNAL OF FLUID MECHANICS, 1987, 182 :335-368
[9]   EFFECTIVE DISTRIBUTION COEFFICIENT OF SILICON DOPANTS DURING MAGNETIC CZOCHRALSKI GROWTH [J].
SERIES, RW ;
HURLE, DTJ ;
BARRACLOUGH, KG .
IMA JOURNAL OF APPLIED MATHEMATICS, 1985, 35 (02) :195-203
[10]  
SERIES RW, 1987, COMMUNICATION