THE EFFECT OF SUBSTRATE MATERIALS ON THE MICROSTRUCTURE AND PHASES OF SILICON-CARBIDE PREPARED BY CHEMICAL VAPOR-DEPOSITION (CVD)

被引：9

作者：

PARK, YS

KIM, MH

LEE, JY

机构：

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 1989年 / 8卷 / 03期

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D O I：

10.1007/BF00725512

中图分类号：

T [工业技术];

学科分类号：

08 ;

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页码：321 / 325

页数：5

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