THERMALLY STABLE OHMIC CONTACTS TO N-TYPE GAAS .2. MOGEINW CONTACT METAL

被引：31

作者：

MURAKAMI, M ^{[1
]}

PRICE, WH ^{[1
]}

SHIH, YC ^{[1
]}

BRASLAU, N ^{[1
]}

CHILDS, KD ^{[1
]}

PARKS, CC ^{[1
]}

机构：

[1] IBM CORP,E FISHKILL FACIL,HOPEWELL JUNCTION,NY 12533

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 08期

关键词：

D O I：

10.1063/1.339337

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：3295 / 3303

页数：9

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