A SWITCHED-CAPACITOR INTERFACE FOR CAPACITIVE PRESSURE SENSORS

被引：55

作者：

YAMADA, M ^{[1
]}

TAKEBAYASHI, T ^{[1
]}

NOTOYAMA, SI ^{[1
]}

WATANABE, K ^{[1
]}

机构：

[1] SMC CORP,DEPT PROD DEV,SOKA 340,JAPAN

来源：

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT | 1992年 / 41卷 / 01期

关键词：

D O I：

10.1109/19.126637

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A switched-capacitor interface for a capacitive pressure sensor is developed which provides a linear digital output. It consists basically of a sample/hold circuit followed by a charge-balancing analog-to-digital converter. The sensor capacitance changes hyperbolically with an applied pressure. To convert the nonlinear capacitance change into the linear digital output, two linearization methods are investigated. In either method, a linear digital output with an accuracy higher than 8-bit is obtained. Because of high accuracy capability and compatible fabrication process, the interface described is best suited for a smart silicon capacitive pressure sensor.

引用

页码：81 / 86

页数：6

共 15 条

[1] APPLICATION OF SWITCHED-CAPACITOR SELF-OSCILLATING CIRCUITS TO THE CONVERSION OF RLC PARAMETERS INTO A FREQUENCY OR DIGITAL SIGNAL [J].