EXPERIMENTAL FOCUSED ION-BEAM SYSTEM USING A GASEOUS FIELD-ION SOURCE

被引：10

作者：

BLACKWELL, RJ ^{[1
]}

KUBBY, JA ^{[1
]}

LEWIS, GN ^{[1
]}

SIEGEL, BM ^{[1
]}

机构：

[1] CORNELL UNIV,NATL RES & RESOURCE FACIL SUBMICRON STRUCT,ITHACA,NY 14853

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 01期

关键词：

D O I：

10.1116/1.583296

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：82 / 86

页数：5

共 26 条

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[2]

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[8]

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[9] SCANNING MICROBEAM USING A LIQUID-METAL ION-SOURCE [J].

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[10]

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