DIELECTRIC FUNCTION OF SPUTTER-DEPOSITED SILICON DIOXIDE AND SILICON-NITRIDE FILMS IN THE THERMAL INFRARED

被引：19

作者：

ERIKSSON, TS

JIANG, S

GRANQVIST, CG

机构：

来源：

APPLIED OPTICS | 1985年 / 24卷 / 06期

关键词：

D O I：

10.1364/AO.24.000745

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

收藏

页码：745 / 746

页数：2

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