FORMATION OF CH RADICAL BY SURFACE BOMBARDMENT IN A METHANE-ARGON DC DISCHARGE

被引：13

作者：

YAMASHITA, Y

TOYODA, H

SUGAI, H

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1989年 / 28卷 / 09期

关键词：

D O I：

10.1143/JJAP.28.L1647

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L1647 / L1650

页数：4

共 8 条

[1]

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