ION-BEAM MIXING OF MARKER LAYERS IN AL AND SI

被引：16

作者：

MANTL, S ^{[1
]}

REHN, LE ^{[1
]}

AVERBACK, RS ^{[1
]}

THOMPSON, LJ ^{[1
]}

机构：

[1] ARGONNE NATL LAB, DIV MAT SCI & TECHNOL, ARGONNE, IL 60439 USA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 7-8卷 / MAR期

关键词：

D O I：

10.1016/0168-583X(85)90444-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：622 / 625

页数：4

共 13 条

[1]

Averback R. S., 1984, Ion Implantation and Ion Beam Processing of Materials. Proceedings of the Symposium, P25

[2] ION MIXING OF MARKERS IN SIO2 AND SI [J].

BARCZ, AJ ;

PAINE, BM ;

NICOLET, MA .

APPLIED PHYSICS LETTERS, 1984, 44 (01) :45-47

[3]

BARCZ AJ, APPL PHYS

[4] ON LOW-TEMPERATURE ION-BEAM MIXING OF THIN MARKERS IN NICKEL [J].

BOTTIGER, J ;

NIELSEN, SK ;

THORSEN, PT .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :707-710

[5]

Chu W.-K., 1978, BACKSCATTERING SPECT, P89

[6] A STUDY OF MIXING BEHAVIOR OF AL-AG, AL-IN AND AL-SN SYSTEMS BY AR ION IRRADIATION [J].

FUJINO, Y ;

YAMAGUCHI, S ;

NARAMOTO, H ;

OZAWA, K .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3) :691-695

[7] ION BEAM MIXING IN AMORPHOUS SILICON - 1. EXPERIMENTAL INVESTIGATION. [J].

Matteson, S. ;

Paine, B.M. ;

Grimaldi, M.G. ;

Mezey, G. ;

Nicolet, M.A. .

Nuclear instruments and methods, 1981, 182 /183 (pt 1) :43-51

[8]

Paine B. M., 1982, Metastable Materials Formation by Ion Implantation. Proceedings of the Materials Research Society Annual Meeting, P79

[9] IMPURITY PROFILE BROADENING AND SHIFTS BY ION-BEAM MIXING [J].

PAINE, BM .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (10) :6828-6833

[10] ION-BEAM MIXING - BASIC EXPERIMENTS [J].

PAINE, BM ;

AVERBACK, RS .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :666-675

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