SIMULATION OF REACTIVE ION ETCHING PATTERN TRANSFER

[1] EVAPORATED FILM PROFILES OVER STEPS IN SUBSTRATES [J]. THIN SOLID FILMS, 1970, 6 (02) : 113 - &

[2] Courant R., 1962, METHODS MATH PHYS, VII, P62

[3] EFFECT OF POTENTIAL-FIELD ON ION DEFLECTION AND SHAPE EVOLUTION OF TRENCHES DURING PLASMA-ASSISTED ETCHING [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (04) : 941 - 949

[4] FISHER DA, 1986, MATER RES SOC S P, V68, P231

[5] LINE-PROFILE RESIST DEVELOPMENT SIMULATION TECHNIQUES [J]. POLYMER ENGINEERING AND SCIENCE, 1977, 17 (06) : 381 - 384

[6] NONLOCAL TRANSPORT MODELS OF THE SELF-CONSISTENT POTENTIAL DISTRIBUTION IN A PLASMA SHEATH WITH CHARGE-TRANSFER COLLISIONS [J]. JOURNAL OF APPLIED PHYSICS, 1988, 64 (11) : 6200 - 6209

[7] SHEATH COLLISION PROCESSES CONTROLLING THE ENERGY AND DIRECTIONALITY OF SURFACE BOMBARDMENT IN O-2 REACTIVE ION ETCHING [J]. JOURNAL OF APPLIED PHYSICS, 1988, 64 (02) : 590 - 597

[8] JURGENSEN CW, IN PRESS J VAC SCI B

[9] JURGENSEN CW, IN PRESS VAC SCI T A

[10] Lamb H., 1945, HYDRODYNAMICS, P7

[1] EVAPORATED FILM PROFILES OVER STEPS IN SUBSTRATES [J]. THIN SOLID FILMS, 1970, 6 (02) : 113 - &

[2] Courant R., 1962, METHODS MATH PHYS, VII, P62

[3] EFFECT OF POTENTIAL-FIELD ON ION DEFLECTION AND SHAPE EVOLUTION OF TRENCHES DURING PLASMA-ASSISTED ETCHING [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (04) : 941 - 949

[4] FISHER DA, 1986, MATER RES SOC S P, V68, P231

[5] LINE-PROFILE RESIST DEVELOPMENT SIMULATION TECHNIQUES [J]. POLYMER ENGINEERING AND SCIENCE, 1977, 17 (06) : 381 - 384

[6] NONLOCAL TRANSPORT MODELS OF THE SELF-CONSISTENT POTENTIAL DISTRIBUTION IN A PLASMA SHEATH WITH CHARGE-TRANSFER COLLISIONS [J]. JOURNAL OF APPLIED PHYSICS, 1988, 64 (11) : 6200 - 6209

[7] SHEATH COLLISION PROCESSES CONTROLLING THE ENERGY AND DIRECTIONALITY OF SURFACE BOMBARDMENT IN O-2 REACTIVE ION ETCHING [J]. JOURNAL OF APPLIED PHYSICS, 1988, 64 (02) : 590 - 597

[8] JURGENSEN CW, IN PRESS J VAC SCI B

[9] JURGENSEN CW, IN PRESS VAC SCI T A

[10] Lamb H., 1945, HYDRODYNAMICS, P7