A PERCOLATION APPROACH TO ION-BEAM INDUCED MODIFICATIONS OF ORGANIC RESISTS

被引：19

作者：

DAVENAS, J ^{[1
]}

XU, XL ^{[1
]}

KHODR, C ^{[1
]}

TREILLEUX, M ^{[1
]}

STEFFAN, G ^{[1
]}

机构：

[1] UNIV LYON 1,ETUD MAT PLAST & BIOMAT,F-69622 VILLEURBANNE,FRANCE

来源：

关键词：

D O I：

10.1016/0168-583X(85)90423-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：513 / 516

页数：4

共 10 条

[1] DAVENAS J, UNPUB RAD EFFECTS
[2] DAVENAS J, UNPUB J PHYSIQUE
[3] FOTI G, 1984, JUN P MRS EUR C STRA
[4] PROPOSED EXCITONIC MECHANISM OF COLOR-CENTER FORMATION IN ALKALI HALIDES
HERSH, HN
[J]. PHYSICAL REVIEW, 1966, 148 (02): : 928 - &
[5] A PERCOLATION THEORY APPROACH TO THE IMPLANTATION INDUCED DIAMOND TO AMORPHOUS-CARBON TRANSITION
KALISH, R
BERNSTEIN, T
SHAPIRO, B
TALMI, A
[J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 52 (3-4): : 153 - 168
[6] OPTICAL AND ELECTRICAL-PROPERTIES OF ION-BEAM-IRRADIATED FILMS OF ORGANIC MOLECULAR-SOLIDS AND POLYMERS
KAPLAN, ML
FORREST, SR
SCHMIDT, PH
VENKATESAN, T
[J]. JOURNAL OF APPLIED PHYSICS, 1984, 55 (03) : 732 - 742
[7] HIGH DOSE ION-IMPLANTATION INTO PHOTORESIST
OKUYAMA, Y
HASHIMOTO, T
KOGUCHI, T
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (08) : 1293 - 1298
[8] INTRODUCTION TO PERCOLATION THEORY
SHANTE, VKS
KIRKPATRICK, S
[J]. ADVANCES IN PHYSICS, 1971, 20 (85) : 325 - +
[9] SMITH TC, 1982, 4TH P INT C ION IMPL
[10] ION-BEAM-INDUCED CONDUCTIVITY IN POLYMER-FILMS
VENKATESAN, T
FORREST, SR
KAPLAN, ML
MURRAY, CA
SCHMIDT, PH
WILKENS, BJ
[J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (06) : 3150 - 3153