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CORRELATION OF STRESS WITH LIGHT-INDUCED DEFECTS IN HYDROGENATED AMORPHOUS-SILICON FILMS

被引：10
作者：
KURTZ, SR
TSUO, YS
TSU, R
机构：
来源：
APPLIED PHYSICS LETTERS | 1986年 / 49卷 / 15期
关键词：
D O I：
10.1063/1.97493
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：951 / 953
页数：3
相关论文
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