THE FLIP-AND-SHIFT SIGNAL ENHANCEMENT APPLICATION FOR A PREDICTIVE ELECTRON-BEAM PATTERN REGISTRATION MODEL

被引：2

作者：

KING, DC

STECKL, AJ

MORGENSTERN, JL

MCDONALD, JF

BOURGEOIS, MA

YEMC, DJ

ELMINYAWI, I

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1986年 / 4卷 / 01期

关键词：

D O I：

10.1116/1.583312

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：273 / 279

页数：7

共 12 条

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[8]

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[9]

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[10] SPATIAL DISTRIBUTION OF BACKSCATTERED ELECTRONS IN SCANNING ELECTRON-MICROSCOPE AND ELECTRON-MICROPROBE [J].

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