MONTE-CARLO SIMULATION OF REGISTRATION SIGNALS FOR ELECTRON-BEAM MICROFABRICATION

被引：7

作者：

LIN, YC

ADESIDA, I

NEUREUTHER, AR

机构：

来源：

APPLIED PHYSICS LETTERS | 1980年 / 36卷 / 08期

关键词：

D O I：

10.1063/1.91604

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：672 / 674

页数：3

共 19 条

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