INTER-DIFFUSION AND COMPOUND FORMATION IN THE C-SI/PTSI/(TI-W)/A1 SYSTEM

被引：50

作者：

CANALI, C

CELOTTI, G

FANTINI, F

ZANONI, E

机构：

[1] CNR,IST LAB MAT ELETTRON,I-40126 BOLOGNA,ITALY

[2] TELETTRA SPA,I-20059 VIMERCATE,ITALY

[3] UNIV MODENA,IST FIS,I-41100 MODENA,ITALY

来源：

THIN SOLID FILMS | 1982年 / 88卷 / 01期

关键词：

D O I：

10.1016/0040-6090(82)90345-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：9 / 23

页数：15

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