REACTION OF SI(100) SINGLE-CRYSTALS WITH NITROGEN-ATOMS

被引：36

作者：

SCHROTT, AG ^{[1
]}

SU, QX ^{[1
]}

FAIN, SC ^{[1
]}

机构：

[1] UNIV WASHINGTON,DEPT PHYS,SEATTLE,WA 98195

来源：

SURFACE SCIENCE | 1982年 / 123卷 / 2-3期

关键词：

D O I：

10.1016/0039-6028(82)90324-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：223 / 230

页数：8

相关论文

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[6] NITRIDATION OF SI(111) BY NITROGEN-ATOMS
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