RECENT ADVANCES IN SILICON EPITAXY AND ITS APPLICATION TO HIGH-PERFORMANCE INTEGRATED-CIRCUITS

被引:13
作者
SRINIVASAN, GR
机构
关键词
D O I
10.1016/0022-0248(84)90268-9
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
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页码:201 / 217
页数:17
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