ON THE DESIGN AND CHARACTERIZATION OF A NOVEL ARSINE CRACKING FURNACE UTILIZING CATALYTIC DECOMPOSITION OF ASH3 TO YIELD A PURELY MONOMERIC SOURCE OF ARSENIC FOR MOLECULAR-BEAM EPITAXIAL-GROWTH OF GAAS

被引：13

作者：

KAPITAN, LW ^{[1
]}

LITTON, CW ^{[1
]}

CLARK, GC ^{[1
]}

COLTER, PC ^{[1
]}

机构：

[1] UNIVERSAL ENERGY SYST,DAYTON,OH 45432

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1984年 / 2卷 / 02期

关键词：

D O I：

10.1116/1.582805

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：280 / 284

页数：5

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