ELECTROMIGRATION IN THIN ALUMINUM FILMS ON TITANIUM NITRIDE

被引：970

作者：

BLECH, IA ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

关键词：

D O I：

10.1063/1.322842

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1203 / 1208

页数：6

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