STUDY OF THE STEPWISE OXIDATION AND NITRIDATION OF SI(111) - ELECTRON-STIMULATED DESORPTION, AUGER-SPECTROSCOPY, AND ELECTRON LOSS SPECTROSCOPY

被引：50

作者：

KNOTEK, ML

HOUSTON, JE

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1983年 / 1卷 / 04期

关键词：

D O I：

10.1116/1.582710

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：899 / 914

页数：16

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