MONTE-CARLO CALCULATIONS OF THE BEAM FLUX DISTRIBUTION FROM MOLECULAR-BEAM EPITAXY SOURCES

被引：11

作者：

ADAMSON, S ^{[1
]}

OCARROLL, C ^{[1
]}

MCGILP, JF ^{[1
]}

机构：

[1] UNIV DUBLIN TRINITY COLL,DEPT PURE & APPL PHYS,DUBLIN 2,IRELAND

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.584772

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：487 / 490

页数：4

共 12 条

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[2] THE ANGULAR-DISTRIBUTION OF THERMAL MOLECULAR-BEAMS FORMED BY SINGLE CAPILLARIES IN THE MOLECULAR-FLOW REGIME [J].

ADAMSON, S ;

OCARROLL, C ;

MCGILP, JF .

VACUUM, 1988, 38 (06) :463-467

[3] THE SPATIAL-DISTRIBUTION OF FLUX PRODUCED BY SINGLE CAPILLARY GAS DOSERS [J].

ADAMSON, S ;

OCARROLL, C ;

MCGILP, JF .

VACUUM, 1988, 38 (4-5) :341-344

[4]

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[5] The beam shaping in the molecular flow. [J].

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ZEITSCHRIFT FUR PHYSIK, 1930, 66 (7-8) :471-476

[6] MOLECULAR-BEAM EPITAXY BEAM FLUX MODELING [J].

CURLESS, JA .

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[7]

DAYTON BB, 1957, 1956 T NATL S VAC TE, P5

[8] PHYSICAL PROBLEMS CONCERNING EFFUSION PROCESSES OF SEMICONDUCTORS IN MOLECULAR-BEAM EPITAXY [J].

HERMAN, MA .

VACUUM, 1982, 32 (09) :555-565

[9]

Luscher P. E., 1980, Molecular beam epitaxy, P15

[10] THICKNESS DISTRIBUTION OF FILMS FABRICATED BY THE MOLECULAR-BEAM EPITAXY TECHNIQUE [J].

NANBU, K ;

WATANABE, Y .

VACUUM, 1986, 36 (06) :349-354

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