THE FABRICATION OF ION-IMPLANTED STRIPE OPTICAL WAVE-GUIDE IN LINBO3

被引：14

作者：

REED, GT

WEISS, BL

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 19-20卷

关键词：

D O I：

10.1016/S0168-583X(87)80182-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：907 / 911

页数：5

共 12 条

[1] CHANNELING STUDIES OF DEPTH OF DAMAGE PRODUCED IN LINBO3 BY 50-1100 KEV HE-4+ IMPLANTATIONS [J].

BARFOOT, KM ;

WEISS, BL .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1984, 17 (03) :L47-L52

[2] NEW PROJECTED RANGE ALGORITHM AS DERIVED FROM TRANSPORT-EQUATIONS [J].

BIERSACK, JP .

ZEITSCHRIFT FUR PHYSIK A-HADRONS AND NUCLEI, 1982, 305 (02) :95-101

[3] A NEW APPROACH TO THE DETERMINATION OF PLANAR WAVE-GUIDE PROFILES BY MEANS OF A NONSTATIONARY MODE INDEX CALCULATION [J].

CHANDLER, PJ ;

LAMA, FL .

OPTICA ACTA, 1986, 33 (02) :127-143

[4] FORMATION OF WAVE-GUIDES AND MODULATORS IN LINBO3 BY ION-IMPLANTATION [J].

DESTEFANIS, GL ;

GAILLIARD, JP ;

LIGEON, EL ;

VALETTE, S ;

FARMERY, BW ;

TOWNSEND, PD ;

PEREZ, A .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (12) :7898-7905

[5] ION-IMPLANTATION INTO LINBO3 [J].

GOTZ, G ;

KARGE, H .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY) :1079-1088

[6] STRIP WAVEGUIDES IN LINBO3 FABRICATED BY COMBINED METAL DIFFUSION AND ION-IMPLANTATION [J].

HEIBEI, J ;

VOGES, E .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1982, 18 (05) :820-825

[7] RADIATION-DAMAGE AND REFRACTIVE-INDEX OF ION-IMPLANTED LINBO3 [J].

KARGE, H ;

GOTZ, G ;

JAHN, U ;

SCHMIDT, S .

NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR) :777-780

[8] DIELECTRIC RECTANGULAR WAVEGUIDE AND DIRECTIONAL COUPLER FOR INTEGRATED OPTICS [J].

MARCATILI, EA .

BELL SYSTEM TECHNICAL JOURNAL, 1969, 48 (07) :2071-+

[9] OPTICAL-PROPERTIES OF PLANAR WAVE-GUIDES FORMED BY HE+ IMPLANTATION IN LINBO3 [J].

NADEN, JM ;

WEISS, BL .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 1985, 3 (04) :855-859

[10]

NADEN JM, UNPUB J LIGHTWAVE TE

← 1 2 →