SILICON DETECTORS FOR CHARGED-PARTICLES MANUFACTURED BY CONVENTIONAL PLANAR TECHNOLOGY

被引:10
作者
SUEVA, D
SPASSOV, V
CHIKOV, N
VAPIREV, EI
IVANOV, I
机构
[1] RES INST TIEPE 2,BU-1738 SOFIA,BULGARIA
[2] BULGARIAN ACAD SCI,INST NUCL RES & NUCL ENERGY,BU-1784 SOFIA,BULGARIA
关键词
D O I
10.1109/23.221047
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Two types of detectors were developed by conventional planar technology: a p+ - n - n+ ion-implanted detector and a n+ - p - p+ diffused detector. Both detectors were investigated for alpha- and beta-spectroscopy and with an additional deposition of a (LiF)-Li-6 converter layer the detectors were tested for detection of neutrons.
引用
收藏
页码:257 / 261
页数:5
相关论文
共 15 条
[1]  
AHAN I, 1990, NUCL INSTRUM METH A, V299, P201
[2]  
[Anonymous], 1968, SEMICONDUCTOR DETECT
[3]   EVALUATION OF PASSIVATED ION-IMPLANTED PLANAR SILICON DETECTORS FOR THE SPECTROSCOPY AND ASSAY OF LOW-ENERGY ELECTRONS [J].
BATTEN, JR .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1989, 277 (2-3) :478-484
[4]   CHARGE COLLECTION IN SILICON STRIP DETECTORS [J].
BELAU, E ;
KLANNER, R ;
LUTZ, G ;
NEUGEBAUER, E ;
SEEBRUNNER, HJ ;
WYLIE, A ;
BOHRINGER, T ;
HUBBELING, L ;
WEILHAMMER, P ;
KEMMER, J ;
KOTZ, U ;
RIEBESELL, M .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 214 (2-3) :253-260
[5]  
BOHM J, 1991, RADIAT PROT DOSIM, V39, P95
[6]   PERFORMANCE AND APPLICATIONS OF ROOM-TEMPERATURE SILICON PASSIVATED ION-IMPLANTED X-RAY-DETECTORS [J].
BURGER, P ;
LAMPERT, MO ;
HENCK, R .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1984, 31 (01) :344-347
[8]   FABRICATION OF LOW-NOISE SILICON RADIATION DETECTORS BY THE PLANAR PROCESS [J].
KEMMER, J .
NUCLEAR INSTRUMENTS & METHODS, 1980, 169 (03) :499-502
[9]  
KEMMER J, 1984, NUCL INSTRUM METH A, V226, P89, DOI 10.1016/0168-9002(84)90173-6
[10]   ION-IMPLANTED SI PN-JUNCTION DETECTORS WITH ULTRATHIN WINDOWS [J].
MAISCH, T ;
GUNZLER, R ;
WEISER, M ;
KALBITZER, S ;
WELSER, W ;
KEMMER, J .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1990, 288 (01) :19-23