APPLICATION OF TOTAL REFLECTION X-RAY-FLUORESCENCE IN SEMICONDUCTOR SURFACE-ANALYSIS

被引：35

作者：

PENKA, V

HUB, W

机构：

来源：

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY | 1989年 / 44卷 / 05期

关键词：

D O I：

10.1016/0584-8547(89)80054-0

中图分类号：

O433 [光谱学];

学科分类号：

0703 ; 070302 ;

摘要：

引用

页码：483 / 490

页数：8

共 15 条

[1] SURFACE-FILM AND INTERFACIAL ANALYSIS VIA VARIABLE GRAZING EXIT ANGLE X-RAY-FLUORESCENCE SPECTROMETRY [J].

ANDERMANN, G .

APPLIED SURFACE SCIENCE, 1988, 31 (01) :1-41

[2]

Chu W. K., 1978, BACKSCATTERING SPECT

[3]

EICHINGER P, 1988, ASTM STP, V990

[4] MEASUREMENT OF FEMTOGRAM QUANTITIES OF TRACE-ELEMENTS USING AN X-RAY MICROPROBE [J].

GIAUQUE, RD ;

THOMPSON, AC ;

UNDERWOOD, JH ;

WU, Y ;

JONES, KW ;

RIVERS, ML .

ANALYTICAL CHEMISTRY, 1988, 60 (09) :855-858

[5] GRAZING-INCIDENCE X-RAY-FLUORESCENCE ANALYSIS [J].

IIDA, A ;

SAKURAI, K ;

YOSHINAGA, A ;

GOHSHI, Y .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1986, 246 (1-3) :736-738

[6]

KERN W, 1970, RCA REV, V31, P187

[7] TOTAL REFLECTION X-RAY-FLUORESCENCE SPECTROMETRY FOR SURFACE-ANALYSIS [J].

KNOTH, J ;

SCHWENKE, H ;

WEISBROD, U .

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1989, 44 (05) :477-481

[8]

PENKA V, IN PRESS FRESENIUS Z

[9] A HIGHLY SENSITIVE ENERGY-DISPERSIVE X-RAY SPECTROMETER WITH MULTIPLE TOTAL REFLECTION OF THE EXCITING BEAM [J].

SCHWENKE, H ;

KNOTH, J .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 193 (1-2) :239-243

[10] DETERMINATION OF TRACE-ELEMENTS IN RAINWATER BY TOTAL-REFLECTION X-RAY-FLUORESCENCE [J].

STOSSEL, RP ;

PRANGE, A .

ANALYTICAL CHEMISTRY, 1985, 57 (14) :2880-2885

← 1 2 →