LIQUID-METAL ION SOURCES FOR FIB MICROFABRICATION SYSTEMS - RECENT ADVANCES

被引：22

作者：

PREWETT, PD ^{[1
]}

KELLOGG, EM ^{[1
]}

机构：

[1] IBT INC,BEVERLY,MA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 6卷 / 1-2期

关键词：

D O I：

10.1016/0168-583X(85)90624-X

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：135 / 142

页数：8

共 27 条

[1]

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AHMED, H .

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[3]

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[4]

COCKHILL TD, 1983, SEMICONDUCTORS 83 IN, P156

[5]

CREWE AV, 1978, OPTIK, V50, P205

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DOHERTY, JA ;

WARD, BW ;

KELLOGG, EM .

IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1983, 6 (03) :329-333

[7] LIQUID-METAL ALLOY ION SOURCES FOR B, SB, AND SI [J].

GAMO, K ;

UKEGAWA, T ;

INOMOTO, Y ;

OCHIAI, Y ;

NAMBA, S .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04) :1182-1185

[8] MECHANISM OF LIQUID-METAL ELECTRON AND ION SOURCES [J].

GOMER, R .

APPLIED PHYSICS, 1979, 19 (04) :365-375

[9] 400-A HIGH ASPECT-RATIO LINES PRODUCED IN POLYMETHYL METHACRYLATE (PMMA) BY ION-BEAM EXPOSURE [J].

KARAPIPERIS, L ;

LEE, CA .

APPLIED PHYSICS LETTERS, 1979, 35 (05) :395-397

[10]

KNAUER W, 1981, OPTIK, V59, P335

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