LASER SCANNING TOMOGRAPHY - DIRECT EVIDENCE OF PRECIPITATE-FREE ZONE AT SURFACE OF SILICON-WAFERS

被引：5

作者：

GALL, P ^{[1
]}

JOLY, JP ^{[1
]}

ROBERT, V ^{[1
]}

FILLARD, JP ^{[1
]}

CASTAGNE, M ^{[1
]}

BONNAFE, J ^{[1
]}

机构：

[1] CEN,LETI,F-38041 GRENOBLE,FRANCE

来源：

关键词：

D O I：

10.1049/el:19890294

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：429 / 430

页数：2

共 10 条

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