THE DEVELOPMENT OF SURFACE DISCONTINUITIES (EDGES) DURING SPUTTERING INDUCED EROSION OF SOLIDS

被引：4

作者：

CARTER, G ^{[1
]}

NOBES, MJ ^{[1
]}

SMITH, R ^{[1
]}

TAGG, MA ^{[1
]}

机构：

[1] LOUGHBOROUGH UNIV TECHNOL, LOUGHBOROUGH LE11 3TU, LEICS, ENGLAND

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 13卷 / 1-3期

关键词：

D O I：

10.1016/0168-583X(86)90536-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：396 / 402

页数：7

共 18 条

[1] ANALYTICAL MODELING OF SPUTTER INDUCED SURFACE MORPHOLOGY [J].

CARTER, G ;

COLLIGON, JS ;

NOBES, MJ .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1977, 31 (02) :65-87

[2] SURFACE-MORPHOLOGY EVOLUTION OF SPUTTERED, MOVING SUBSTRATES [J].

CARTER, G ;

NOBES, MJ ;

CRUZ, SA .

JOURNAL OF MATERIALS SCIENCE LETTERS, 1984, 3 (06) :523-527

[3] THEORY OF DEVELOPMENT OF SURFACE-TOPOGRAPHY UNDER SPATIOTEMPORALLY HETEROGENEOUS SPUTTERING CONDITIONS [J].

CARTER, G ;

NOBES, MJ .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 2 (1-3) :635-639

[4] GROWTH OF TOPOGRAPHY DURING SPUTTERING OF AMORPHOUS SOLIDS .4. GENERALIZED THEORY [J].

CARTER, G ;

COLLIGON, JS ;

NOBES, MJ .

JOURNAL OF MATERIALS SCIENCE, 1973, 8 (10) :1473-1481

[5] THE DEVELOPMENT OF SURFACE-MORPHOLOGY BY SPUTTER ETCHING OF STATIONARY AND MOVING SUBSTRATES [J].

CARTER, G ;

NOBES, MJ ;

CRUZ, SA ;

LEWIS, GW .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :840-845

[6] THE FORMATION AND EVOLUTION OF EDGES ON SPUTTER-ERODED SURFACES [J].

CARTER, G ;

NOBES, MJ .

PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1985, 51 (05) :745-763

[7]

CARTER G, 1984, ION BOMBARDMENT SOLI, pCH5

[8] EVOLUTION OF WELL-DEFINED SURFACE CONTOUR SUBMITTED TO ION-BOMBARDMENT - COMPUTER-SIMULATION AND EXPERIMENTAL INVESTIGATION [J].

DUCOMMUN, JP ;

CANTAGREL, M ;

MOULIN, M .

JOURNAL OF MATERIALS SCIENCE, 1975, 10 (01) :52-62

[9] DEVELOPMENT OF A GENERAL SURFACE CONTOUR BY ION EROSION - THEORY AND COMPUTER-SIMULATION [J].

DUCOMMUN, JP ;

CANTAGREL, M ;

MARCHAL, M .

JOURNAL OF MATERIALS SCIENCE, 1974, 9 (05) :725-736

[10] KINEMATIC THEORY OF CRYSTAL-GROWTH AND DISSOLUTION PROCESSES .2. [J].

FRANK, FC .

ZEITSCHRIFT FUR PHYSIKALISCHE CHEMIE-FRANKFURT, 1972, 77 (1-6) :84-&

← 1 2 →