HYDROGEN AND FLUORINE PROFILES IN GDF3 FILMS MEASURED BY SPUTTER-INDUCED OPTICAL EMISSION

被引：14

作者：

TSONG, IST

BHALLA, AS

机构：

来源：

APPLIED PHYSICS LETTERS | 1978年 / 32卷 / 06期

关键词：

D O I：

10.1063/1.90061

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：381 / 383

页数：3

相关论文

共 23 条

[1] SIMPLE TECHNIQUE FOR DECORATING FERROELECTRIC DOMAINS IN GADOLINIUM MOLYBDATE
BHALLA, A
CROSS, LE
[J]. JOURNAL OF MATERIALS SCIENCE, 1977, 12 (11) : 2346 - &
[2] QUANTITATIVE-ANALYSIS OF HYDROGEN IN GLOW-DISCHARGE AMORPHOUS SILICON
BRODSKY, MH
FRISCH, MA
ZIEGLER, JF
LANFORD, WA
[J]. APPLIED PHYSICS LETTERS, 1977, 30 (11) : 561 - 563
[3] USE OF NUCLEAR-REACTIONS AND SIMS FOR QUANTITATIVE DEPTH PROFILING OF HYDROGEN IN AMORPHOUS SILICON
CLARK, GJ
WHITE, CW
ALLRED, DD
APPLETON, BR
MAGEE, CW
CARLSON, DE
[J]. APPLIED PHYSICS LETTERS, 1977, 31 (09) : 582 - 585
[4] GOLUBOVIC A, 1976, 5TH P ANN C INFR LAS, P168
[5] ION-BEAM-INDUCED ATOMIC MIXING
HAFF, PK
SWITKOWSKI, ZE
[J]. JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) : 3383 - 3386
[6] Haller W., 1963, PHYS CHEM GLASSES, V4, P217
[7] HYDROGEN IMPURITY IN NATURAL GEM DIAMOND
HUDSON, PRW
TSONG, IST
[J]. JOURNAL OF MATERIALS SCIENCE, 1977, 12 (12) : 2389 - 2395
[8] NEW PRECISION TECHNIQUE FOR MEASURING CONCENTRATION VERSUS DEPTH OF HYDROGEN IN SOLIDS
LANFORD, WA
TRAUTVETTER, HP
ZIEGLER, JF
KELLER, J
[J]. APPLIED PHYSICS LETTERS, 1976, 28 (09) : 566 - 568
[9] GLASS HYDRATION - METHOD OF DATING GLASS OBJECTS
LANFORD, WA
[J]. SCIENCE, 1977, 196 (4293) : 975 - 976
[10] LANFORD WA, UNPUBLISHED