OPTICAL-SURFACE PROFILE TRANSDUCER

被引：8

作者：

QUERCIOLI, F

TIRIBILLI, B

MOLESINI, G

机构：

[1] Istituto Nazionale di Ottica, Florence, Italy, Istituto Nazionale di Ottica, Florence, Italy

来源：

OPTICAL ENGINEERING | 1988年 / 27卷 / 02期

关键词：

ELECTROOPTICAL DEVICES - LENSES - Design - OPTICAL INSTRUMENTS - TRANSDUCERS;

D O I：

10.1117/12.7976658

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A noncontacting electrooptical probe is presented that is capable of monitoring the surface height of a sample in ranges of interest for mechanical tooling machines. The surface microtopography is reconstructed after scanning. The working principleis based on monotonic longitudinal chromatic aberration of a lens. Characteristics of a designed lens are reported, along with interferometric testing data on a fabricated prototype. Calibration curves of the complete device are given. After interfacing to a personal computer, automatic probing and scanning are implemented. Results on selected samples are presented.

引用

页码：135 / 142

页数：8

共 21 条

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